By means of scanning cathodoluminescence (CL) measurements, high-resolution
transmission electron microscopy (HRTEM), and electron energy loss spectro
scopy (EELS), we have studied the origin of the band-A emission in homoepit
axial diamond thin films grown using microwave-plasma chemical vapor deposi
tion (CVD). A broad luminescence peak at around 2.9 eV, the band-A emission
, was observed in homoepitaxial diamond films with nonepitaxial crystallite
s (NC's), but not in the high-quality films without NC's. The scanning CL m
easurements showed that the band-A emission appeared only at NC sites. TEM
revealed that the NC's contained defects such as dislocations and several t
ypes of grain boundary (GB). Further, HRTEM indicated that several types of
incoherent GB existed within the NC's including five-, six-, and seven-mem
ber carbon atom rings. These were the same GB's as those in polycrystalline
CVD diamond films that had sp(2)-like structure of carbon atoms as indicat
ed by the observation of the 1s-pi* signal in EELS. It is then reasonable t
o consider that, if sp(2)-like structures behave as defects in the network
of sp(3) structure of diamond, one possible origin of band-A emission might
be the sp(2) defects in the GB's and dislocations. The band-A emission beh
avior in homoepitaxial CVD diamond films is the same as that in polycrystal
line diamond films. The origin of the band-A emission generally observed in
many kinds of CVD diamond is discussed relative to these results.