X-ray standing wave and reflectometric characterization of multilayer structures - art. no. 245409

A microstructural characterization of synthetic periodic multilayers by x-r ay standing waves is presented. It is show that the analysis of multilayers by combined x-ray reflectometry (XRR) and x-ray standing-wave (XSW) techni ques dan overcome the deficiencies of the individual techniques in microstr uctural analysis. While interface roughnesses are more accurately determine d by the XRR technique, the layer composition is more accurately determined by the XSW technique, where an element is directly identified by its chara cteristic emission. These aspects are explained with an example of a 20-per iod Pt/C multilayer. The composition of the C layers due to Pt dissolution in the C layers, PtxCl1-x, is determined by the XSW technique. In the XSW a nalysis, when the entire amount of Pt present in the C layers is assumed to be within the broadened interface, this leads to larger interface roughnes s values, inconsistent with those determined by the XRR technique. Constrai ning the interface roughness values to those determined by the XRR techniqu e requires an additional amount of dissolved Pt in the C layers to explain the Pt fluorescence yield excited by the standing-wave field. This analysis provides the average composition PtxCl1-x of the C layers.