In this research, two tasks were pursued: (1) determination of the ons
et temperature of ferroelectric hysteresis properties of SrBi2Ta2O9 th
in films by structure development study, and (2) low temperature proce
ssing for thin film fabrication. For task (1), a nondestructive optica
l method using spectroscopic ellipsometry was utilized for characteriz
ing the structure development of SrBi2Ta2O9 thin films. The optical co
nstants and film thickness were measured as a function of annealing te
mperature by spectroscopic ellipsometry. By observing the changes in r
efractive indices and film thickness, the temperatures of phase transf
ormation and grain growth were determined. Consistent results were obt
ained from x-ray diffraction measurements. By comparing the results of
the structure development study and ferroelectric hysteresis properti
es investigation, the onset temperature of the hysteresis curve of SrB
i2Ta2O9 with 50% excess Bi was determined to be about 700 degrees C. T
he critical factor for the compound to exhibit a well-defined hysteres
is curve was found to be the grain size. For task (2), the effects of
excess Bi content and Nb/Ta ratio of SrBi2(Ta1-xNbx)(2)O-9 on the ferr
oelectric hysteresis properties were studied. It was found that the on
set temperature for obtaining well-defined hysteresis properties can b
e reduced by adding excess Bi or increasing Nb/Ta ratio. By choosing S
rBi2Nb2O9 with 50% excess Bi, the onset temperature of the hysteresis
curve was reduced to about 650 degrees C.