Formation of phases developing by solid-state reaction in Al thin film and
Pt vapour beam is reported, The samples have been studied by high temperatu
re sequential deposition (HTSD) [Mat. Sci. Forum, 22-24 (1987) 617]. The Al
and Pt were deposited by e-beam evaporation on a-C layers supported by TEM
microgrids in an UHV system. A special evaporation arrangement made possib
le to visualise the sequentially forming phases side by side by creating we
dge-shaped area with increasing Al film thickness in the half shadow of the
sample holder. By changing the quantity of elements available for the reac
tion the sequences of intermetallic Al3Pt2, AIPt(2), and AIPt, phases have
been found. The samples were investigated by electron microscopy techniques
(TEM, SAED, EDS). The electron diffraction patterns have been evaluated by
the ProcessDiffraction program [J.L. Labar in Proc. XII. EUREM, Bmo, July
9-14, 2000, I 379]. (C) 2001 Elsevier Science B.V. All rights reserved.