Electrical characteristics of pyroelectric modified lead titanate arrays we
re measured at different temperatures. The modified lead titanate films wer
e deposited by metal-organic decomposition. Dielectric loss tangent (tans)
as low as 0.045 at 30 Hz was obtained at room temperature with lanthanum ni
ckel oxide electrodes. For the purpose of this study, micromachined 40 x 40
mum(2) pixels made of 200-nm-thick pyroelectric films were connected in pa
rallel into 10- or 100-pixel arrays. Noise measurements showed the temperat
ure and frequency dependence of tan delta noise to coincide with the calcul
ated results, At room temperature, the best 10-pixel array showed a tan del
ta noise current as low as 2 x 10(-15) A/Hz(1/2) at the operating frame rat
e of 30 Hz, As expected, 1/f noise was observed proportional to applied cur
rent when the pixels were dc biased. (C) 2001 Published by Elsevier Science
Ltd.