Specific properties of the PZT-based thin-film capacitor structures with excess lead oxide

The effect of excess lead oxide on the microstructure and ferroelectric pro perties of lead zirconate titanate (PZT) films was studied in PZT-based thi n-film capacitor structures. It is shown that excess lead in the form of le ad oxide is localized at the grain boundaries and film-platinum electrode i nterfaces, which can result in the appearance of internal electric fields a nd the self-polarization of PZT films. It is suggested that the self-polari zation effect is related to the formation of a built-in electric charge wit h different densities at the bottom and top metal electrode-ferroelectric f ilm interfaces. (C) 2001 MAIK "Nauka/Interperiodica".