Mass spectrometry for on-line monitoring of perfluoro compounds using Li+ ion attachment techniques

Ion attachment mass spectrometry is being developed for continuous measurem ent of perfluoro compounds (PFCs) found in the atmosphere as a result of se miconductor manufacturing processes. Studies were made on 5 greenhouse gase s, CF4, CHF3, C2F6 SF6, and c-C4F8, to develop improved methods for PFC ana lysis, particularly at levels found in the atmosphere (the parts-per-billio n concentration range). The results demonstrate the feasibility of performi ng real-time measurements of the trace amounts of PFCs encountered in proce ss facilities by generating adduct ions from Li+ ion attachment. The identi fication and detection of c-C4F8 is described as an example of the utility of this new method.