T. Prutskij et al., Study of AlGaAs laser heterostructures with multiquantum well active region grown by low temperature liquid phase epitaxy, CRYST RES T, 36(4-5), 2001, pp. 395-401
In this paper we describe the growth and characteristics of AlGaAs/GaAs las
er structures with 2, 3, and 4 quantum wells in their active region fabrica
ted by Low-Temperature Liquid phase Epitaxy (LT-LPE) technique. The techniq
ue uses a piston boat and the temperatures of crystallization are in the 40
0-600 degreesC range. Scanning Electron Microscope and Photoluminescence ex
periments show the good planarity and reproducibility of these structures.
It is shown that the thickness of the QW layers depend on the supercooling
temperature for a given growth time and temperature.