Tuning of detection wavelength of quantum-well infrared photodetectors by quantum-well intermixing

Proton implantation followed by rapid thermal annealing was used to tune th e spectral response of the quantum-well infrared photodetectors (QWIPs). Va rious implantation schemes, such as single low energy implantation, multipl e energy implantation, and single high energy implantation were compared fo r tuning the wavelength of QWIPs. Large redshift of the QWIPs' response wav elength with either narrowed or broadened spectrum was obtained after inter diffusion. Comparatively, the single high energy scheme is the simplest and most effective method. Furthermore, by applying a two-step implant-anneal sequence to single high energy implantation, the device wavelength was furt her shifted with improved photocurrent signal, making it promising to achie ve the fabrication of multi-color detectors. (C) 2001 Elsevier Science B.V. All rights reserved.