Optical in situ monitoring of complex oxide thin film laser molecular beamepitaxy

We report the optical in situ monitoring results of the laser molecular bea m epitaxial growth of complex oxide thin films using an oblique-incidence r eflectance difference (OIRD) technique. The sub-monolayer sensitivity, opti cal interference oscillations, monolayer response observed for heteroepitax y, and the surface kinetics study of OIRD measurement are presented. By usi ng a four-layer stack model, the interference oscillations and the monolaye r response are reproduced with Fresnel's formulas for multi-layers. (C) 200 1 Elsevier Science B.V. All rights reserved.