Thin films of La0.67Sr0.33MnO3 (LSMO) were prepared at 670 degreesC on LaAl
O3, (LAO) and SrTiO3 (STO) substrates by liquid-delivery metalorganic chemi
cal vapor deposition. X-ray diffraction analysis 2 theta/theta and pole fig
ure scans showed that the films are epitaxial with (001)(LSMO)//(001)(LAO)
and (001)(LSMO)//(001)(STO). The crystal structure of LSMO/LAO was indexed
as face-centered cubic with a double cell and LSMO/STO as simple cubic. Ele
ctron microscopy revealed square facets and elongated grain features. Films
heat-treated between 700 and 800 degreesC on LAO resulted in a structural
change, while those on STO showed an increase in texture.