Epitaxial Srn+1TinO3n+1 thin films with n = 1-5 were synthesized on (001) S
rTiO3 substrates by reactive molecular beam epitaxy. The structure and micr
ostructure of the films were investigated by x-ray diffraction, transmissio
n electron microbeam diffraction, and high-resolution transmission electron
microscopy (HRTEM) in combination with computer image simulations. Both di
ffraction and HRTEM studies revealed that all the films are epitaxially ori
ented with their c axis perpendicular to the (001) SrTiO3 plane of the subs
trate. Detailed investigations using quantitative HRTEM methods indicated t
hat the films have the expected n = 1-5 structures of the Ruddlesden-Popper
Srn+1TinO3n+1 homologous series. Among these films, Sr2TiO4, Sr3Ti2O7, and
Sr4Ti3O10, thin films are nearly free of intergrowths, while Sr5Ti4O13 and
Sr6Ti5O16 thin films contain noticeably more antiphase boundaries in their
perovskite sheets and intergrowth defects. We show that these results are
consistent with what is known about the thermodynamics of Srn+1TinO3n+1 pha
ses.