Optical real-time monitoring of the laser molecular-beam epitaxial growth of perovskite oxide thin films by an oblique-incidence reflectance-difference technique

We report the results of optical in situ monitoring of the epitaxial growth of perovskite oxide thin films by an oblique-incidence reflectance-differe nce (OIRD) technique. Optical oscillation that corresponds to the growth cy cle of an interrupted growth mode (monolayer oscillation) is observed. The monolayer oscillation shows different behaviors for layer-by-layer, Stransk i-Krastanow, and three-dimensional growth modes. Optical interference oscil lation is observed. The dependencies of the real and the imaginary parts of the hulk film's refractive index on the OIRD signal are discussed and illu strated with a three-layer stack mode. Thin-film complex refractive-index a nd highly accurate thickness measurements can be obtained by fitting of the interference oscillation. (C) 2001 Optical Society of America.