Formation of arrays of straight copper wires on solid substrate by electrodeposition

Citation
S. Zhong et al., Formation of arrays of straight copper wires on solid substrate by electrodeposition, J PHYS JPN, 70(6), 2001, pp. 1452-1455
Citations number
32
Categorie Soggetti
Physics
Journal title
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN
ISSN journal
00319015 → ACNP
Volume
70
Issue
6
Year of publication
2001
Pages
1452 - 1455
Database
ISI
SICI code
0031-9015(200106)70:6<1452:FOAOSC>2.0.ZU;2-T
Abstract
Straight copper wire arrays are electrochemically deposited on a silicon su bstrate without utilizing additives or templates. To suppress the influence of the factors which arouse the ramification of the copper electrodeposit, an ultrathin electrochemical deposition system and an initially homogeneou s electric field are used. The width of the copper wires may vary from abou t 200 nm to about 1.5 mum depending on the control parameters. The microstr ucture of the copper wires and their electric resistance after vacuum-annea ling at 200 degreesC are studied. We suggest that this self-organized coppe r electrodeposition is helpful in gaining an understanding of the formation of dense-branching morphology. It also implies the potential application i n microelectronics.