Scanning force microscope measurement of the parameters of the profiles ofsubmillimeter VLSI components

Authors
Gornev, ES Novikov, YA Plotnikov, YI Rakov, AV
Citation
Es. Gornev et al., Scanning force microscope measurement of the parameters of the profiles ofsubmillimeter VLSI components, MEAS TECH R, 44(1), 2001, pp. 44-48
Citations number
8
Categorie Soggetti
Instrumentation & Measurement
Journal title
MEASUREMENT TECHNIQUES
ISSN journal
05431972 → ACNP
Volume
44
Issue
1
Year of publication
2001
Pages
44 - 48
Database
ISI
SICI code
0543-1972(200101/02)44:1<44:SFMMOT>2.0.ZU;2-H
Abstract
A geometric model of a scanning force microscope (atomic force microscope) (SFM) cantilever with micro- and nanostructures is considered. A linens gau ge is proposed for SFM calibration and for definition the SFM probe paramet ers. SEM and SFM methods of measuring submicrometer dimensions of relief st ructures are compared.