Manipulating matter at the nanometre scale is important for many electronic
, chemical and biological advances(1-3), but present solid-state fabricatio
n methods do not reproducibly achieve dimensional control at the nanometre
scale. Here we report a means of fashioning matter at these dimensions that
uses low-energy ion beams and reveals surprising atomic transport phenomen
a that occur in a variety of materials and geometries. The method is implem
ented in a feedback-controlled sputtering system that provides fine control
over ion beam exposure and sample temperature. We call the method "ion-bea
m sculpting'', and apply it to the problem of fabricating a molecular-scale
hole, or nanopore, in a thin insulating solid-state membrane. Such pores c
an serve to localize molecular-scale electrical junctions and switches(4-6)
and function as masks(7) to create other small-scale structures. Nanopores
also function as membrane channels in all living systems, where they serve
as extremely sensitive electro-mechanical devices that regulate electric p
otential, ionic flow, and molecular transport across cellular membranes(8).
We show that ion-beam sculpting can be used to fashion an analogous solid-
state device: a robust electronic detector consisting of a single nanopore
in a Si3N4 membrane, capable of registering single DNA molecules in aqueous
solution.