Direct laser writing of mid-infrared microelements on polyethylene material

Microlenses, microlens arrays, and diffraction gratings can be made by irra diating a polyethylene substrate with a CO2 laser. These elements are meant to work with mid-infrared light (10.6-mum wavelength). The influence of so me fabrication process variables in the final parameters of the elements is analyzed. Their quality was characterized by the direct measurement of the ir surface profiles. The ability of microlenses to focus mid-infrared light and to form infrared images is shown, and an introductory study of the gra tings is given. (C) 2001 Society of Photo-Optical Instrumentation Engineers .