NUMERICAL STUDY AND OPTIMIZATION OF CHEMICAL-VAPOR-DEPOSITION PROCESSIN FABRICATING ZINC SELENIDE FILMS

Authors
VOROBEV AN GARIBIN EA KHORUZHNIKOV SE MIRONOV IA
Citation
An. Vorobev et al., NUMERICAL STUDY AND OPTIMIZATION OF CHEMICAL-VAPOR-DEPOSITION PROCESSIN FABRICATING ZINC SELENIDE FILMS, Materials science & engineering. B, Solid-state materials for advanced technology, 47(3), 1997, pp. 204-209
Citations number
6
Categorie Soggetti
Material Science","Physics, Condensed Matter
Journal title
Materials science & engineering. B, Solid-state materials for advanced technology → ACNP
ISSN journal
09215107
Volume
47
Issue
3
Year of publication
1997
Pages
204 - 209
Database
ISI
SICI code
0921-5107(1997)47:3<204:NSAOOC>2.0.ZU;2-8
Abstract
The numerical study and optimization of chemical vapor deposition proc ess in fabricating zinc selenide films were carried on the basis of th e three-dimensional transport equations for low Mach number flows. The optimization technics was developed and the optimum regimes were foun d. (C) 1997 Elsevier Science S.A.