Performance of customized control charts to detect process disturbances

Authors
Heredia-Langner, A Montgomery, DC Runger, GC Borror, CM Post, RI
Citation
A. Heredia-langner et al., Performance of customized control charts to detect process disturbances, QUAL REL EN, 17(3), 2001, pp. 205-218
Citations number
10
Categorie Soggetti
Engineering Management /General
Journal title
QUALITY AND RELIABILITY ENGINEERING INTERNATIONAL
ISSN journal
07488017 → ACNP
Volume
17
Issue
3
Year of publication
2001
Pages
205 - 218
Database
ISI
SICI code
0748-8017(200105/06)17:3<205:POCCCT>2.0.ZU;2-D
Abstract
In this paper we demonstrate the use of control charts based on orthogonal contrasts for a semiconductor manufacturing process. The statistical perfor mance of individuals control charts based on these contrasts and their expo nentially weighted moving average counterparts is compared to that of the t raditional approach. Contrast-based charts have superior detection capabili ties than the traditional approach when targeted at specific process distur bances. Copyright (C) 2001 John Wiley & Sons, Ltd.