Self-organization processes and optical activation of the Er3+ ions in amorphous hydrogenated Er-doped silicon films

The formation of the optically active centers in the a-Si:(H,Er) films obta ined by the method of magnetron sputtering of the mosaic target containing Er with the O impurity was investigated. The microstructure of the films wa s investigated by electron microscopy, and crystallites from 5 to 50 nm in size depending on the Er concentration were found. It was assumed that not only the local surroundings of the Er ion but also the self-organization pr ocesses affect the intensity of the photoluminescence band in the vicinity of 1.54 mum. (C) 2001 MAIK "Nauka/Interperiodica".