Heterojunction solar cells have been manufactured by depositing n-type a-Si
:H on p-type 1-2 Omega cm Cz single-crystalline silicon substrates. An effi
ciency of 14.2% has been obtained for 1 cm(2) solar cells by using a simple
(Al/(p) c-Si/(n) a-Si:Hi/ITO/metal grid) structure. With an additional sur
face texturing, we have reached an efficiency of 15.3% for 1 cm2 solar cell
s. We have investigated the dark IV-curves in order to contribute to a bett
er understanding of the basis of solar cells. (C) 2001 Elsevier Science B.V
. All rights reserved.