Comparative study of interfaces of Fe-Al multilayers prepared by direct and crossed-beam pulsed laser deposition

Fe/Al multilayers with different composition were prepared by conventional, direct-pulsed laser deposition (DPLD) and crossed-beam pulsed laser deposi tion (CBPLD). Films were studied by means of X-ray reflectometry, wide-angl e X-ray scattering and X-ray absorption fine structure experiments. Ballist ic simulations of the deposition processes were performed. It is found that adjacent Fe and Al layers are partially intermixed during the deposition, forming Fe-Al transition layers of a few nm in thickness. Both DPLD and CBP LD multilayers have comparable interfaces. In Fe-rich layers, a b.c.c. soli d solution is formed. Al-rich layers of approximately 5 nm in nominal thick ness are amorphous. DPLD samples have a higher Al content and a significant number of incorporated Al droplets. (C) 2001 Elsevier Science B.V. All rig hts reserved.