Study on formation process of surface plasma

Authors
Zhang, GQ Ge, YJ Yang, WJ Zhao, ZF
Citation
Gq. Zhang et al., Study on formation process of surface plasma, THIN SOL FI, 390(1-2), 2001, pp. 243-247
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
390
Issue
1-2
Year of publication
2001
Pages
243 - 247
Database
ISI
SICI code
0040-6090(20010630)390:1-2<243:SOFPOS>2.0.ZU;2-6
Abstract
A suitable equation group used to describe the establishment process and ch aracteristics of induced dielectric barrier discharge (IDBD) plasma have be en determined. Some experiments have been done which are used to examine wh ether the equation group is right or not. The examination results show that the equation groups are correct and can be used to design an IDBD device. (C) 2001 Elsevier Science B.V. All rights reserved.