We have investigated the electronic band structure of hydrogen and oxygen a
dsorbed single and double layer stepped Si(100) surfaces by Empirical Tight
Binding (ETB) method. The total electronic energies of the H,O-S-A, D-A, D
-B type stepped Si(100) systems are calculated with limited number of hydro
gen and oxygen atoms separately to find out the most probable adsorption si
tes of the adatoms in the initial stage of hydrogenation and oxidation.