Three-dimensional STEM for observing nanostructures

A new scanning transmission electron microscope has been developed for thre e-dimensional (3D) observations of nanostructures. Using double spherical f ulcra, accurate eucentric rotation was achieved. Cylindrical specimens for 3D-observation were prepared by a microsampling technique using a focused i on beam. Copper via-holes of a semiconductor memory device and ZnO particle s were observed by the 3D-STEM from different directions, and 3D-data of th e ZnO particles were successfully reconstructed in a topography mode.