Uncooled membrane-type linear microbolometer array based on a VOx film

Authors
Zerov, VY Malyarov, VG Khrebtov, IA Kulikov, YV Shaganov, II Smirnov, AD
Citation
Vy. Zerov et al., Uncooled membrane-type linear microbolometer array based on a VOx film, J OPT TECH, 68(6), 2001, pp. 428-431
Citations number
10
Categorie Soggetti
Optics & Acoustics
Journal title
JOURNAL OF OPTICAL TECHNOLOGY
ISSN journal
10709762 → ACNP
Volume
68
Issue
6
Year of publication
2001
Pages
428 - 431
Database
ISI
SICI code
1070-9762(200106)68:6<428:UMLMAB>2.0.ZU;2-0
Abstract
This paper describes the arrangement, the fabrication technique, and the re sults of studying a 65-element uncooled membrane-type linear microbolometer array. With a time constant of 3 ms, microbolometers with a temperature-se nsitive VOx film and a constant bias current have a detectivity of up to 5 X 10(7) cm Hz(1/2)/W in the 8-12-mum region. (C) 2001 The Optical Society o f America.