Ion implantation of MeV Au+ into potassium titanyl phosphate

Potassium titanyl phosphate (KTiOPO4 or KTP) was implanted with 1.0 MeV Au ions to a fluence of 5 x 10(15) ions cm(-2) at room temperature under diff erent angles of incidence. The longitudinal and lateral range profiles, dif fusion, damage, surface morphology and structure have been studied by Ruthe rford backscattering (RBS)/channelling, scanning electron microscopy (SEM) and x-ray diffraction. The results show that(l) the experimental mean proje cted range is larger than the value predicted by TRIM (transport of ions in matter) by about 15%; (2) the experimental range straggling and lateral sp read deviate from the TRIM predictions by around 50 and 20%, respectively; (3) the crystal is completely amorphized in the damaged region; (4) the imp lanted gold in KTiOPO4 is stable against annealing at 700 degreesC, but dif fusion takes place at and above 800 degreesC; (5) the surface morphology is different for virgin and Au+ implanted KTiOPO4.