Influence of substrate roughness on the layering of particles in nanocermet thin films

The morphology of nanocermet thin films deposited on substrates having diff erent roughnesses has been studied by surface sensitive x-ray scattering te chniques. Grazing incidence small angle scattering data of the films shows that the nanoparticles, which are present in the ceramic matrix, exhibit a specific average interparticle separation. Analysis of the x-ray reflectivi ty indicates that, in the films deposited on smooth substrates, the nanopar ticles adopt some layering along the growth direction. This layering tends to diminish with increasing substrate roughness and vanish completely for v ery high substrate roughness. The variation of such layering with substrate roughness is an indication that it starts close to the substrate and is an effect of the substrate boundary condition.