COMPARISON OF HIGH-PRESSURE DC-SPUTTERING AND PULSED-LASER DEPOSITIONOF SUPERCONDUCTING YBA2CU3OX THIN-FILMS

Superconducting YBa2CucOx thin films were deposited on NdGaO3 (110) su bstrates using two different techniques: de sputtering at high oxygen pressure and pulsed laser deposition. The structure, electrical proper ties, and surface morphology of the obtained films were compared. The superior crystal quality of de-sputtered films fabricated at the same temperature and at oxygen pressure of the same range as for laser-depo sited films can be explained by a lower deposition rate providing time for recrystallization processes. The re-evaporation becomes significa nt for de sputtering at high deposition temperatures and results in Ba -deficient films. The high mobility of atoms on the surface of the gro wing film during laser deposition helps in the formation of smooth c-o riented areas of the film.