Investigation of the optical and electro-optical properties of hexagonal boron nitride thin films deposited by PECVD technique

Citation
A. El-yadouni et al., Investigation of the optical and electro-optical properties of hexagonal boron nitride thin films deposited by PECVD technique, OPT MATER, 17(1-2), 2001, pp. 319-322
Citations number
8
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
OPTICAL MATERIALS
ISSN journal
09253467 → ACNP
Volume
17
Issue
1-2
Year of publication
2001
Pages
319 - 322
Database
ISI
SICI code
0925-3467(200106/07)17:1-2<319:IOTOAE>2.0.ZU;2-0
Abstract
Thin films of hexagonal boron nitride (h-BN) are deposited on glass-ITO sub strates by a plasma enhanced chemical vapour deposition (PECVD) process. In vestigations of guiding and optical properties of films are performed by us ing nl-lines spectroscopy. Ordinary and extraordinary refractive indices an d the optical anisotropy are determined from TE and TM mode excitations. El ectro-optic characterisation is performed using the guided mode angular shi ft technique. (C) 2001 Elsevier Science B.V. All rights reserved.