We study the creation of metastable defects induced by illumination with la
ser light (the Stabler-Wronski effect) in stoichiometric hydrogenated amorp
hous silicon carbide (a-Si1-xCx : H). We follow the defect creation kinetic
s through the decrease in photoluminescence as a function of time and incid
ent power. A stretched-exponential increase in the number of defects is fou
nd, in very much the same way as in hydrogenated amorphous silicon but with
different material parameters. Comparison is made with the available model
s. From the time t and power P dependences of the measured increase in the
number of defect, we conclude that the well-known p(2/3)t(1/3) law does not
hold for a-Si1-xCx : H. The details of the power dependence of the defect
creation show that the mechanism of reconfiguration of defects is more appr
opriate. Finally, it is shown that illumination with subbandgap light, norm
alized to the same number of absorbed photons, produces only small changes.
This phenomenon can be introduced into the models through a maximum config
uration energy of a state that can be transformed into a non-radiative cent
re.