Multibeams dynamical theory of electron diffraction has been used to calcul
ate the fast electron thickness-integrated probability density on Ti and Al
sites in the gamma -TiAl phase as a function of the incident electron beam
orientation along [100], [110] and [011] zone axes, with the effect of abs
orption considered. Both of the calculation and experiments show that there
are big differences in electron channeling effect for different zone axes
or the same axis but with different orientations, so we should choose prope
r zone axis and suitable incident beam tilting angles when using the axial
electron channeling statistical method to determine the site occupancies of
impurities. It is suggested to calculate the channeling effect map before
the experiments.