S. Capone et al., Application of a semiconductor sol-gel sensor array to the discrimination of pollutants in air, THIN SOL FI, 391(2), 2001, pp. 314-319
Pure and Pd, Pt and Os activated tin oxide thin films have been prepared by
the sol-gel process. The physical properties have been investigated by var
ious techniques such as Fourier transform infrared (FTIR), X-ray diffractio
n (XRD) and scanning electron microscopy (SEM) to obtain information on che
mical, structural and morphological composition of the layers. In particula
r microstructure and morphology has been shown to be dependent on the prese
nce of the doping element. Integrated gas micro-sensors were obtained that
showed the different sensing characteristics depending also on doping eleme
nts. PCA analysis was performed on an array consisting of the prepared sens
ors and the results have shown the capability to discriminate different air
pollutants. (C) 2001 Elsevier Science B.V. All rights reserved.