Application of a semiconductor sol-gel sensor array to the discrimination of pollutants in air

Citation
S. Capone et al., Application of a semiconductor sol-gel sensor array to the discrimination of pollutants in air, THIN SOL FI, 391(2), 2001, pp. 314-319
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
391
Issue
2
Year of publication
2001
Pages
314 - 319
Database
ISI
SICI code
0040-6090(20010716)391:2<314:AOASSS>2.0.ZU;2-J
Abstract
Pure and Pd, Pt and Os activated tin oxide thin films have been prepared by the sol-gel process. The physical properties have been investigated by var ious techniques such as Fourier transform infrared (FTIR), X-ray diffractio n (XRD) and scanning electron microscopy (SEM) to obtain information on che mical, structural and morphological composition of the layers. In particula r microstructure and morphology has been shown to be dependent on the prese nce of the doping element. Integrated gas micro-sensors were obtained that showed the different sensing characteristics depending also on doping eleme nts. PCA analysis was performed on an array consisting of the prepared sens ors and the results have shown the capability to discriminate different air pollutants. (C) 2001 Elsevier Science B.V. All rights reserved.