The advantages of SiC for high power, microwave devices are discussed.
The design considerations, fabrication; and experimental results are
described for SiC MESFETs and SITs. The highest reported f(max) for a
0.5 mu m MESFET using semi-insulating 4H-SiC is 42 GHz. These devices
also showed a small signal gain of 5.1 dB at 20 GHz. Other 4H-SiC MESF
ETs have shown a power density of 3.3 W/mm at 850 MHz. The largest SiC
power transistor reported is a 450 W SIT measured at 600 MHz. The pow
er output density of this SIT is 2.5 times higher than that of compara
ble silicon devices. SITs have been designed to operate as high as 3.0
GHz. with a 3 cm periphery part delivering 38 W of output power.