Ammonium dichromate-chemostimulated thermal oxidation of gallium arsenide

Authors
Mittova, IY Pinyaeva, OA Pukhova, VV Lavrushina, SS Bogdanova, OY
Citation
Iy. Mittova et al., Ammonium dichromate-chemostimulated thermal oxidation of gallium arsenide, RUSS J IN C, 46(11), 2001, pp. 1601-1606
Citations number
18
Categorie Soggetti
Inorganic & Nuclear Chemistry
Journal title
RUSSIAN JOURNAL OF INORGANIC CHEMISTRY
ISSN journal
00360236 → ACNP
Volume
46
Issue
11
Year of publication
2001
Pages
1601 - 1606
Database
ISI
SICI code
0036-0236(200111)46:11<1601:ADTOOG>2.0.ZU;2-L
Abstract
The kinetics of GaAs thermal oxidation and the composition of layers grown in the presence of ammonium dichromate were studied. Analysis was made with reference to previous studies concerning GaAs thermal oxidation in the pre sence of chromium (nitrogen) compounds. Activation by ammonium dichromate p rovides for the development of the process simultaneously through the catio nic and anionic routes.