Ms. Leu et al., The influence of magnetic solenoid filtration on the property of (Ti-Al)N coatings deposited in a cathodic arc deposition system, SURF COAT, 148(1), 2001, pp. 25-29
The magnetic solenoid filtration techniques (both d.c. and a.c. modes) are
employed in the present study for elimination of macroparticles present in
the coatings deposited by the cathodic arc deposition system. The influence
of the magnetic filtration technique on the property of (Ti-Al)N coatings
is investigated. Properties of the coatings evaluated in terms of surface r
oughness, coating thickness, chemical composition and high temperature oxid
ation resistance are compared with the base line data derived from coatings
prepared from a conventional cathodic arc deposition system. The surface s
moothness of the resultant coating is considerably improved by the magnetic
solenoid filtration technique, with some sacrifice in coating thickness. T
he a.c. magnetic solenoid filtration technique is observed to deliver the b
est combination result of coating thickness and surface smoothness. The rel
ative contents of aluminum, titanium and nitrogen in the coatings are also
observed to vary with the mode of solenoid filtration techniques employed,
i.e. a.c., d.c. or no solenoid applied. The variation of aluminum content i
n (Ti-Al)N coating also demonstrates its effect in the property of high tem
perature oxidation resistance. Ironically, (Ti-Al)N coatings deposited by t
he conventional cathodic arc system performed best in terms of oxidation re
sistance due to the retention of Al element in the coating. (C) 2001 Elsevi
er Science B.V. All rights reserved.