Structure and properties of novel functional diamond-like carbon coatings produced by laser ablation

Diamond-like carbon (DLC) mainly consists of sp(3) bonded carbon atoms. It can have properties that rival those of crystalline diamond. Its beneficial properties stem from the continuous rigid random networks of sp(3) carbon atoms, and the properties can essentially be tailored by the sp(3)/sp(2) ra tio. DLC coatings or thin films can be prepared by pulsed laser ablation (P LA), filtered cathodic vacuum arc (FCVA) deposition and mass selected ion b eam (MSIB) deposition. In the past decade, tremendous progress has been mad e in experimental and theoretical investigations of hydrogen-free DLC. Expe rimental and commercial applications in microelectronics, micro- tribology, biomedical technologies, etc., have been demonstrated. Potential applicati ons include sensors, flat panel displays (field emitters), photodiode, etc. In this paper, we report comprehensively the past and recent efforts in th e research of functional diamond-like carbon coatings prepared by pulsed la ser ablation in our group. In order to alleviate the internal compressive s tress problem associated with high quality DLC coatings, we have adopted a novel and simple target design. The films were characterized by Raman spect roscopy, transmission electron microscopy, IR range optical measurements, t ribological measurement. etc. (C) 2001 Elsevier Science B.V. All rights res erved.