In this paper we report nitriding studies of stainless steel 316 using a br
oad ion beam source. Experiments performed by changing the ion energy (0.2-
1.5 KeV), ion current density (1.4-5.7 mA/cm(2)) and implantation times (1
and 8 h) at a temperature around 380 degreesC are reported. The microstruct
ure and morphology are studied by glancing angle X-ray diffraction and scan
ning electron microscopy. For constant ion energy, higher nitrogen ion flux
increases the hardness. At higher ion energies the sputtering process prev
ents the formation of a thick-nitrated layer, even for longer implantation
times. The results are examined in the light of recent studies on physical
models for ion implantation. (C) 2001 Elsevier Science B.V. All rights rese
rved.