Probing surface morphology by diffraction techniques is well establish
ed, especially for atomic steps on bare surfaces or on adlayer covered
surfaces. The diffuse scattering contains information about the terra
ce size distribution. The sharpness of this distribution determines th
e shape of the spot profiles. While one observes a single broad should
er for broad distributions, the shoulder splits into satellites for sh
arp distributions. For sharp distributions the average terrace size de
termines mainly the satellite position while the half-width of the sat
ellites is governed by the standard deviation of the distribution. For
broad distributions the situation is vice versa. Generally the should
er can be fitted very well by two satellites with Lorentzian shape so
that one can easily obtain the two prominent parameters of the terrace
size distribution (average terrace size and standard deviation) from
the splitting of the shoulder and the half-widths of the satellites. A
dditionally, this model is extended to two-dimensional surfaces with s
tep trains. For a single step train with fluctuating steps the diffrac
tion pattern shows a weak diffuse shoulder besides the strong satellit
es due to the average step-step distance. This effect is also predicte
d for crossing step trains which mimic mounds on the surface. Therefor
e equivalent to the one-dimensional case, the average terrace size and
the local slope of the surface can be analysed from the satellite pos
ition and their half-width. (C) 1997 Elsevier Science B.V.