THE PROPERTIES OF SOME VOLATILE ALKYL (DI-ALKYLAMIDO)ZINC(II) AND BIS(DI-ALKYLAMIDO) ZINC-COMPOUNDS - POTENTIAL ZINC PRECURSORS IN MOCVD

A series of compounds with the general formula Zn(NR2)(2) where R = Et , 'Pr, 'Bu; or RZnNR'(2) where R = Me, Et; R' = Et,'Pr,'Bu, SiMe3; and R = Np or 'Bu; R' = Et, 'Pr, 'Bu; have been synthesized and character ised. Vapour pressure measurements have been carried out to assess the potential suitability of such compounds as zinc precursors. Vapour pr essures of alkyl(di-alkylamido)zinc(II) appear to be ca 5 Torr at 0 de grees C which makes then suitable zinc precursors for MOCVD (Molecular Organic Chemical Vapour Deposition) whereas bis(di-alkylamido)zinc(II ) are viscous liquids with low volatility. (C) 1997 Elsevier Science L td.