X-RAY-SCATTERING STUDIES OF SURFACE-ROUGHNESS OF GAAS ALAS MULTILAYERS/

We discuss the theory of X-ray scattering from multilayers with confor mal roughness of the interfaces, and illustrate with an analysis of sp ecular, diffuse and wide-angle scattering from a GaAs/AlAs multilayer. This is a highly coherent multilayer structure deposited on a stepped , but otherwise smooth surface. The roughness due to the steps propaga tes through the layers and a distinct anisotropy is observed in the di ffuse scattering. We discuss a method to treat diffuse scattering from such surfaces with slightly irregular steps.