We report a novel process to fabricate single-mode independently addre
ssable oxide-isolated vertical-cavity surface-emitting laser (VCSEL) a
rrays. The array is fabricated with a novel simple two-mask process wh
ere a single oxidation layer is used to define the laser aperture and
to isolate the interconnects. The 4 x 8 VCSEL array has very uniform e
lectrical, modal and geometrical characteristics that make it ideal fo
r two-dimensional (2-D) array applications.