X-ray standing waves measurements have been performed on a set of six
InAsP/InP superlattices exhibiting a wide range of lattice strain valu
es and on both the (002) and (004) reflections. The objective was to a
ssess the XSW technique as a structural probe in superlattices. For sa
mples with perpendicular lattice misfit less than 1.5% we find clear X
SW modulations in the As fluorescence; this signal is well reproduced
by simulations performed by solving the Takagi-Taupin equations. For s
amples with higher misfit a negligible XSW signal is found indicating
considerable lattice disorder.