The tunneling current in Si planar-doped GaAs/AlAs single-barrier diod
es is studied. First, we determine the effects of growth interruption
and doped Si impurities on the tunneling current. We observe excess cu
rrent for a sample with Si doping during growth interruption (Si plana
r doping) in the AlAs barrier, while we do not observe it for a sample
which was subjected only to growth interruption. This result shows th
at the excess current is not caused by impurities incorporated from th
e background during growth interruption but by the intentional doping
of Si impurities, We then examine the dependence of the excess current
on Si concentration. The excess current increases as the Si concentra
tion increases. This result provides further evidence that Si impuriti
es introduce paths for the flow of the excess current. In the conducta
nce-voltage characteristics, we observe a peak corresponding to the ex
cess current. This peak suggests that the excess current Rows through
zero-dimensional states, Finally, we discuss the Si donor levels as po
ssible origins of the excess current. The shallow donor level is proba
bly responsible for the excess current.