COMPARATIVE ROLE OF METAL-ORGANIC DECOMPOSITION-DERIVED[100] AND DECOMPOSITION-DERIVED[111] IN ELECTRICAL-PROPERTIES OF PB(ZR,TI)O-3 THIN-FILMS

The effect of composition (phase), texture, microstructure and thickne ss on electrical properties of Pb(Zr1-zTiz)O-3 (PZT) films have been e valuated. Zr-rich PZT films with [111] texture have a higher remanent polarization and dielectric constant, but a lower coercive field as co mpared with PZT[100] films. Ti-rich PZT films with [100] texture have a higher dielectric constant, but a lower remanent polarization and co ercive field as compared with PZT[111] films. Near the morphotropic ph ase boundary (MPB) composition, films with a mixed texture of [111] an d [100] have a higher dielectric constant than PZT[100] and PZT[111] f ilms even though the values of remanent polarization and coercive fiel d of the mixed textured films are in between those of the other two fi lms. Both remanent and saturation polarization are independent of film thickness, whereas dielectric constant decreases but coercive field i ncreases at very small thickness.