MEASUREMENT OF TERRACE WIDTH DISTRIBUTION ON AN SI(110) SURFACE USINGHIGH-TEMPERATURE SCANNING-TUNNELING-MICROSCOPY

High-temperature scanning tunneling microscopy is used to study the st atistical distribution of terrace width on an Si(110) surface at 720 d egrees C. It is confirmed that the terrace width is fitted by the Gaus sian distribution standard deviations (sigma) of which are proportiona l to the mean terrace width. It is considered that the step-step inter action potential energy is Ax(-2) (x: normal distance to the step edge and A: proportionality constant). As the mean value of the main peak is 19.27 nm and the step height 0.19 nm, it is confirmed that the surf ace is oriented within 1 degrees from the {1l0} surface.