PRODUCTION OF A LARGE-DIAMETER UNIFORM PLASMA BY MODIFIED MAGNETRON-TYPED RADIO-FREQUENCY DISCHARGE

The properties of a new plasma source, i.e. a large-scale modified-mag netron typed (MMT) radio frequency (RF) plasma source, are investigate d for producing a uniform high-density plasma with a large diameter of the order of 1 m. A plasma with uniformity within a few percent is pr oduced over 120 cm in diameter in front of the substrate under an argo n pressure of 1 m Torr. The plasma density is 6 x 10(10) cm(-3) at the axial center of the RF electrode when the incident RF power is 2.8 kW . The plasma density is almost proportional to the RF power. Since the structure of MMT plasma source is quite simple, it is useful for larg e area plasma processing.