2-DIMENSIONAL NONEQUILIBRIUM PLASMA MODELING BASED ON THE PARTICLE-BOLTZMAN HYBRID MODEL FOR RF GLOW-DISCHARGES

A two-dimensional self-consistent nonequilibrium numerical method base d on the particle and Boltzmann equation hybrid model has been develop ed to study the radio-frequency (rf) glow discharge. In this paper, th e presented particle-Boltzmann hybrid model has been applied to two ty pes of rf glow discharge. One is the parallel-place capacitively coupl ed plasma (CCP) of Ar gas. The model predicted the spatial profile of Ar((3)p(5)) density, which shows good agreement with the experimental emission profile of ArI (lambda = 419.8nm). The other is the ladder el ectrode inductively coupled plasma (LICP) of SiH4 gas. It is found tha t electrons obtain their energy from both the electrostatic field enha nced by the edge effect and the induced electric field.