This study compares the nitriding efficiency of a low-pressure pure-ni
trogen rf plasma for the materials AISI-316 stainless steel, 99.8% iro
n and the low-alloy steels AISI 4140 and En41B. The process temperatur
e was 400 degrees C; a range of gas pressures and biasing conditions w
as explored. The treated samples were examined using instrumented micr
ohardness measurements; proton backscattering, X-ray diffraction and o
ther diagnostics. The degree of nitriding is enhanced by increased bom
bardment by excited neutral molecules. Ion bombardment assists in the
nitriding of iron and the low-alloy steels studied, apparently by aidi
ng the production of Fe2-3N. This phase does not form in the nitriding
of 316 stainless steel, and therefore treatment of this material is n
ot assisted by ion bombardment. In comparing low-pressure rf plasmas t
o procedures involving higher pressures and temperatures, the process
described here is more appropriate for hardening austenitic stainless
steel, but perhaps less appropriate for the other materials.