SPECTROSCOPIC STUDY OF VAPOR-PHASE REACTIONS IN PREPARATION OF YBA2CU3O7-X OXIDE THIN-FILM USING PULSED-LASER DEPOSITION

Vapor-phase reactions in plasma plume during preparation of YBa2Cu3O7- x superconducting thin film are investigated using optical emission sp ectroscopy. Argon/oxygen gas mixtures of various ratios are used as am bient to study the formation of diatomic oxides. Most of YO and some o f BaO molecules are formed in the vapor, while CuO molecules are not f ormed in the vapor but only ejected from the target. To obtain high-qu ality oxide thin films, fluxes of the oxide molecules. atoms and ions reaching a substrate, which are dependent on laser energy density, arg on mixture ratio and total pressure, should be controlled.